Abstract :
The field of measurement microsystems has progressed with advances in the fields of microelectronics, micromechanics, microoptics, and digital signal processing (DSP). In this article, the author summarizes a unified conceptual basis for measurement microsystems, discusses some specifics of integration, and describes an innovative approach to the development of a micro-opto-electrical system (MOEMS), a microspectrometer on a chip. This example highlights the complexity of the problem of transition from a successful laboratory concept proof to a product that can be manufactured.
Keywords :
measurement systems; micro-optics; micromechanical devices; spectrometers; digital signal processing; measurement microsystems; microelectronics; micromechanics; microoptics; microoptoelectrical system; microspectrometer on a chip; Application specific integrated circuits; Digital signal processing; Digital signal processing chips; Electric variables measurement; Instruments; Length measurement; Microelectronics; Semiconductor device measurement; Signal processing; Time measurement;
