Author_Institution :
Dept. of Mech. & Ind. Eng., Massachusetts Univ., Amherst, MA, USA
Abstract :
The rapid development of microelectromechanical systems (MEMS) technologies in recent years has provided a high degree of spatial miniaturization and integration of electromechanical components, which enable integrated sensing and control in manufacturing. This article provides an overview of the state of the art of micromachined microsensors for the measurement of mechanical signals in the manufacturing industry for automobiles, manufacturing, medical equipment, environment, robotics, food, and other consumer products. Measurements of pressure, acceleration, and acoustic emission (AE) are the three physical quantities that are most encountered in industrial and manufacturing applications. Discussed are the major design parameters of such microsensors, such as dynamic range, sensitivity, resolution, and accuracy and provide a real-world application. Also discussed are the issues related to the spatial integration of signal processing, power supply, and wireless communication with the sensing elements, which are of direct relevance to the overall performance of the microsensors.
Keywords :
acceleration measurement; acoustic emission; acoustic variables measurement; manufacturing industries; micromachining; microsensors; pressure measurement; pressure sensors; acceleration; acoustic emission; automobiles; dynamic range; electromechanical components; industrial applications; integrated control; integrated sensing; manufacturing applications; manufacturing industry; mechanical signal measurement; medical equipment; micromachined microsensors; power supply; sensing elements; signal processing; wireless communication; Acoustic measurements; Automobile manufacture; Biomedical equipment; Control systems; Food manufacturing; Mechanical variables measurement; Medical control systems; Microelectromechanical systems; Micromechanical devices; Microsensors;
