DocumentCode

1005376

Title

Ozone oxidation of silicon

Author

Kazor, A. ; Boyde, I.W.

Volume

29

Issue

1

fYear

1993

fDate

1/7/1993 12:00:00 AM

Firstpage

115

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:19930075

Filename

256233