• DocumentCode
    1005501
  • Title

    Piezojunction effect based pressure sensor

  • Author

    Matovic, J. ; Djuric, Z. ; Vujanic, A.

  • Author_Institution
    Belgrade Univ., Yugoslavia
  • Volume
    29
  • Issue
    6
  • fYear
    1993
  • fDate
    3/18/1993 12:00:00 AM
  • Firstpage
    565
  • Lastpage
    566
  • Abstract
    The authors describe a method for fabricating integrated pressure sensors based on the piezojunction effect. Localised stress concentration is realised via a micromachining-fabricated needle-like structure, which is an integral part of the diaphragm. Such a stress concentrator emulates the previously used hard stylus. Owing to the absence of any friction, a reliable and hysteresis-free output was obtained.
  • Keywords
    electric sensing devices; micromechanical devices; piezoelectric transducers; pressure sensors; diaphragm; micromachined structure; needle-like structure; piezojunction effect; pressure sensor; stress concentrator;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19930378
  • Filename
    256246
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1005501