DocumentCode
1008988
Title
InGaAs photodiodes prepared by low-pressure MOCVD
Author
Poulain, P. ; Razeghi, M. ; Kazmierski, K. ; Blondeau, R. ; Philippe, Pernelle
Author_Institution
Thomson-CSF, Laboratoire Central de Recherches, Orsay, France
Volume
21
Issue
10
fYear
1985
Firstpage
441
Lastpage
442
Abstract
InGaAs/InP double-heterostructure PIN photodiodes are demonstrated using the low-pressure MOCVD growth technique. Several types of detectors are reported, ranging from small-area ones suitable for PINFET implementation to broad-area general-purpose devices for both long- and short-wavelength applications. These diodes have performances equivalent to those obtained when using conventional growth techniques.
Keywords
III-V semiconductors; chemical vapour deposition; gallium arsenide; indium compounds; III-V semiconductors; InGaAs/InP double-heterostructure PIN photodiodes; PINFET implementation; broad-area general-purpose devices; growth techniques; long-wavelength applications; low-pressure MOCVD; low-pressure MOCVD growth technique; short-wavelength applications;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19850314
Filename
4251219
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