Title :
Plasma density measurement using a frequency sweeping short antenna
Author :
Li, Kam-chi ; Chen, Kun-Mu
Author_Institution :
Dept. of Electrical Eng., Hong Kong Polytechnic, Hong Kong
fDate :
7/1/1976 12:00:00 AM
Abstract :
A new scheme has been developed to measure the plasma density directly with the use of a short antenna driven by a sweeping frequency RF source and biased by a variable negative dc voltage.
Keywords :
Plasma measurements; Probe antennas; Antenna measurements; Density measurement; Frequency measurement; Oscillators; Oscilloscopes; Plasma density; Plasma measurements; Plasma sheaths; Probes; Voltage;
Journal_Title :
Antennas and Propagation, IEEE Transactions on
DOI :
10.1109/TAP.1976.1141378
