Title :
Spectroscopic characteristics of argon plasma produced by multistage pseudospark discharges
Author :
Chuen-Huei Yang ; Itoh, Kenji ; Takahashi, Shin-ichiro ; Obara, Minoru
Author_Institution :
Dept. of Electr. Eng., Keio Univ., Yokohama, Japan
fDate :
12/1/1993 12:00:00 AM
Abstract :
A measurement is made of the spectroscopic characteristics of argon plasma produced by multistage pseudospark discharges in a peculiar geometry which has not yet been reported in literature. High electron temperature, high peak current density, and a high degree of ionization are demonstrated in such a device. The population number density of the upper and lower levels of 488.0, 476.6, 514.5, 351.1, and 363.8 nm transitions in ArII and ArIII are measured. The ultraviolet emission characteristics of pure Ar and Ar/He mixture plasmas are compared. An appreciable increase is observed in peak intensities of ArIII lines when nitrogen is added to Ar
Keywords :
argon; plasma diagnostics; plasma production; plasma temperature; 363.8 to 488.0 nm; Ar plasma; Ar-He mixture plasma; Ar-N2; ArII; ArIII; degree of ionization; electron temperature; high peak current density; multistage pseudospark discharges; peak intensities; population number density; spectroscopic characteristics; ultraviolet emission characteristics; Argon; Current density; Electrons; Geometry; Plasma density; Plasma devices; Plasma measurements; Plasma properties; Plasma temperature; Spectroscopy;
Journal_Title :
Plasma Science, IEEE Transactions on
