Title :
Automated Hall effect profiler for electrical characterisation of semiconductors
Author :
Young, N.D. ; Hight, M.J.
Author_Institution :
Philips Research Laboratories, Redhill, UK
Abstract :
An automated system for the profiling of impurity distributions in doped semiconductor layers is presented. The instrument utilises the differential Hall effect technique, combining electrical measurement with thin layer removal. An example profile is given to demonstrate the capability of the instrument.
Keywords :
Hall effect; automatic test equipment; automatic testing; electric variables measurement; impurity distribution; semiconductor device testing; semiconductor thin films; ATE; Hall effect profiler; automated system; automatic test equipment; differential Hall effect technique; doped semiconductor layers; electrical characterisation; electrical measurement; electrolytic Hall cell; impurity distributions; microcomputer control; thin layer removal;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19850741
