DocumentCode
1012100
Title
Automated Hall effect profiler for electrical characterisation of semiconductors
Author
Young, N.D. ; Hight, M.J.
Author_Institution
Philips Research Laboratories, Redhill, UK
Volume
21
Issue
22
fYear
1985
Firstpage
1044
Lastpage
1046
Abstract
An automated system for the profiling of impurity distributions in doped semiconductor layers is presented. The instrument utilises the differential Hall effect technique, combining electrical measurement with thin layer removal. An example profile is given to demonstrate the capability of the instrument.
Keywords
Hall effect; automatic test equipment; automatic testing; electric variables measurement; impurity distribution; semiconductor device testing; semiconductor thin films; ATE; Hall effect profiler; automated system; automatic test equipment; differential Hall effect technique; doped semiconductor layers; electrical characterisation; electrical measurement; electrolytic Hall cell; impurity distributions; microcomputer control; thin layer removal;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19850741
Filename
4251576
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