DocumentCode
1012408
Title
The Future of N/MEMS
Author
Scott Barker, N.
Volume
8
Issue
6
fYear
2007
Firstpage
52
Lastpage
55
Abstract
The overall program seeks to ease transition of N/MEMS technologies into Department of Defense systems and has encouraged involvement from the commercial sector by requiring significant industrial sponsorship of each center.
Keywords
defence industry; micromechanical devices; nanotechnology; Department of Defense systems; MEMS technologies; NEMS technologies; microelectromechanical systems; nanoelectromechanical systems; Defense industry; Design automation; Dielectric thin films; Laboratories; Micromechanical devices; Nanoelectromechanical systems; Predictive models; Radiofrequency microelectromechanical systems; Switches; Very large scale integration;
fLanguage
English
Journal_Title
Microwave Magazine, IEEE
Publisher
ieee
ISSN
1527-3342
Type
jour
DOI
10.1109/MMM.2007.904735
Filename
4405049
Link To Document