Title :
Demonstrating Reliability
Author :
Goldsmith, Chuck ; Maciel, John ; McKillop, John
Author_Institution :
MEMtronics Corp., Plano
Abstract :
This article highlights some of the recent reliability demonstrations for both ohmic and capacitive MEMS switches and provides a snapshot of the present state of RF MEMS switch reliability for upcoming military and commercial applications.
Keywords :
capacitor switching; encapsulation; microswitches; microwave switches; military equipment; millimetre wave devices; ohmic contacts; reliability; statistical process control; RF MEMS switch reliability; capacitive MEMS switches; commercial applications; microwave frequency; military applications; millimeter-wave frequency; ohmic MEMS switches; statistical process control; wafer-level encapsulation; Lifetime estimation; Micromechanical devices; Microswitches; Ohmic contacts; Packaging; Phased arrays; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Testing;
Journal_Title :
Microwave Magazine, IEEE
DOI :
10.1109/MMM.2007.907197
