Are Diamonds a MEMS´ Best Friend?

Author

Auciello, Orlando ; Pacheco, Sergio ; Sumant, Anirudha V. ; Gudeman, Chris ; Sampath, Suresh ; Datta, Arindom ; Carpick, Robert W. ; Adiga, Vivekananda P. ; Zurcher, Peter ; Ma, Zhenqiang ; Yuan, Hao-Chih ; Carlisle, John A. ; Kabius, Bernd ; Hiller, Jon

Author_Institution

Argonne Nat. Lab., Argonne

Volume

8

Issue

6

fYear

2007

Firstpage

61

Lastpage

75

Abstract

Next-generation military and civilian communication systems will require technologies capable of handling data/ audio, and video simultaneously while supporting multiple RF systems operating in several different frequency bands from the MHz to the GHz range [1]. RF microelectromechani-cal/nanoelectromechanical (MEMS/NEMS) devices, such as resonators and switches, are attractive to industry as they offer a means by which performance can be greatly improved for wireless applications while at the same time potentially reducing overall size and weight as well as manufacturing costs.

Keywords

micromechanical devices; micromechanical resonators; microswitches; telecommunication; MEMS devices; NEMS devices; RF microelectromechanical devices; RF nanoelectromechanical devices; RF systems; civilian communication systems; diamonds; military communication systems; resonators; switches; Adhesives; Laboratories; Materials science and technology; Micromechanical devices; Nanoelectromechanical systems; Nanoscale devices; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Switches;

fLanguage

English

Journal_Title

Microwave Magazine, IEEE

Publisher

ieee

ISSN

1527-3342

Type

jour

DOI

10.1109/MMM.2007.907816

Filename

4405051