40 GHz compact TFMS meander-line bandpass filter on silicon substrate

Presented is a compact millimetre-wave bandpass filter using a thin-film microstrip meander line on standard 0.18 mum CMOS silicon substrate without any post-processing step yet still reducing the substrate loss and crosstalk to a large extent. To miniaturize overall circuit size, a half-wavelength resonator is constructed in meander-line configuration and its resonant frequency is designed to be 40 GHz. The prototype single-resonator bandpass filter occupies a circuit area of 210 times 210 mum on silicon. Measured insertion loss is 2.5 dB, which agrees well with the design value in the simulations.