Title :
A study of the effects of thin oxide seed layers on the magnetic anisotropy of RF-sputtered CoCr thin films
Author :
Byun, C. ; Simpson, E.M. ; Sivertsen, J.M. ; Judy, J.H. ; Simpson, E. ; Sivertsen, J. ; Judy, Jack
Author_Institution :
University of Minnesota, Minneapolis, MN.
fDate :
9/1/1985 12:00:00 AM
Abstract :
The effects of thin oxide seed layers on the magnetic and structural properties of RF-sputtered CoCr films have been investigated. A 200 A thick Co oxide seed layer reactively-sputtered on amorphous cover glass and silicon dioxide substrates increased the perpendicular magnetic anisotropy constant (Kl) by as much as 40% and decreased the HCP
Keywords :
Chromium; Magnetic anisotropy; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Perpendicular magnetic recording; Radio frequency; Sputtering; Substrates; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1985.1064069
