DocumentCode
1013241
Title
A study of the effects of thin oxide seed layers on the magnetic anisotropy of RF-sputtered CoCr thin films
Author
Byun, C. ; Simpson, E.M. ; Sivertsen, J.M. ; Judy, J.H. ; Simpson, E. ; Sivertsen, J. ; Judy, Jack
Author_Institution
University of Minnesota, Minneapolis, MN.
Volume
21
Issue
5
fYear
1985
fDate
9/1/1985 12:00:00 AM
Firstpage
1453
Lastpage
1455
Abstract
The effects of thin oxide seed layers on the magnetic and structural properties of RF-sputtered CoCr films have been investigated. A 200 A thick Co oxide seed layer reactively-sputtered on amorphous cover glass and silicon dioxide substrates increased the perpendicular magnetic anisotropy constant (Kl) by as much as 40% and decreased the HCP
Keywords
Chromium; Magnetic anisotropy; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Perpendicular magnetic recording; Radio frequency; Sputtering; Substrates; X-ray diffraction;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1985.1064069
Filename
1064069
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