DocumentCode :
1013871
Title :
Study on less-than-4-µm period permalloy propagation tracks using a new narrow-gap delineation technique
Author :
Yonekura, Y. ; Yanase, T. ; Majima, T. ; Watanabe, H.
Author_Institution :
Fujitsu Laboratories, Atsugi, Japan
Volume :
21
Issue :
5
fYear :
1985
fDate :
9/1/1985 12:00:00 AM
Firstpage :
1684
Lastpage :
1686
Abstract :
We have developed a new narrow-gap delineation technique using conventional photolithography, which can decrease the gap size down to 0.2 μm by ion-milling Cu-coated 1-μm-gap photo resist patterns. By applying this narrow gap process to a new bubble propagation structure, less-than-4-μm-period propagation tracks and turns were designed and tested. Good propagation performance in a 3 μm period straight track and 180° turns was obtained at quasi-static operation with three consecutive 1 μm bubbles although no bias margin of consecutive bubbles was obtained in less-than-2.6-μm-period tracks even at the drive field of 80 Oe.
Keywords :
Magnetic bubble memories; Permalloy memories; Fabrication; Garnet films; Plasma applications; Plasma temperature; Radio frequency; Resins; Resists; Sputter etching; Temperature control; Virtual manufacturing;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.1985.1064122
Filename :
1064122
Link To Document :
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