Title :
Realization of an Ultracompact Low-Loss Photonic Crystal Corner Mirror
Author :
Yu, Hejun ; Yu, Jinzhong ; Fan, Zhongchao ; Chen, Shaowu
Author_Institution :
Chinese Acad. of Sci., Beijng
fDate :
7/15/2007 12:00:00 AM
Abstract :
We report on the realization and characterization of an ultracompact, low-loss, and broadband corner mirror based on photonic crystals (PCs). By modifying the boundary layers of the PC region, extra losses of dB per corner mirror are achieved for transverse-electronic polarization for silicon-on-insulator ridge waveguides fabricated by electron beam lithography and inductively coupled plasma etching. Dimensions of the PC corner mirror are less than, which are only about one tenth of conventional waveguide corner mirrors.
Keywords :
electron beam lithography; integrated optics; mirrors; optical fabrication; optical losses; optical materials; optical waveguide components; photonic crystals; ridge waveguides; silicon-on-insulator; sputter etching; broadband photonic crystal corner mirror; electron beam lithography; inductively coupled plasma etching; silicon-on-insulator ridge waveguide fabrication; transverse-electronic polarization; ultracompact low-loss corner mirror; Electron beams; Lithography; Mirrors; Optical coupling; Optical losses; Personal communication networks; Photonic crystals; Plasma applications; Polarization; Silicon on insulator technology; Corner mirror; photonic crystal (PC); silicon-on-insulator (SOI);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2007.899459
