• DocumentCode
    1014278
  • Title

    Analytical models for n+-p+ double-gate SOI MOSFET´s

  • Author

    Suzuki, Kunihiro ; Sugii, Toshihiro

  • Author_Institution
    Fujitsu Labs. Ltd., Atsugi, Japan
  • Volume
    42
  • Issue
    11
  • fYear
    1995
  • fDate
    11/1/1995 12:00:00 AM
  • Firstpage
    1940
  • Lastpage
    1948
  • Abstract
    Previously, we proposed n+-p+ double-gate SOI MOSFET´s, which have n+ polysilicon for the back gate and p+ polysilicon for the front gate to enable adjustment of the threshold voltage, and demonstrated high speed operation. In this paper, we establish analytical models for this device, This transistor has two threshold voltages related to n+ and p+ polysilicon gates: Vth1 and Vth2, respectively. V th1 is a function of the gate oxide thickness tOx and SOI thickness tSi and is about 0.25 V when tOx/tSi=5, while Vth2 is insensitive to tOx and tSi and is about 1 V. We also derive models for conduction charge and drain current and verified their validity by numerical analysis. Furthermore, we establish a scaling theory unique to the device, and show how to design the device parameters with decreasing gate length. We show numerically that we can design sub 0.1 μm gate length devices with an an appropriate threshold voltage and an ideal subthreshold swing
  • Keywords
    MOSFET; semiconductor device models; silicon-on-insulator; 0.1 mum; 0.25 V; 1 V; I-V characteristics; SOI thickness; Si; Si-SiO2; analytical models; conduction charge; drain current; gate length; gate oxide thickness; high speed operation; n+ polysilicon back gate; n+-p+ double-gate SOI MOSFET; nMOSFET; numerical analysis; p+ polysilicon front gate; pMOSFET; scaling theory; subthreshold swing; threshold voltage adjustment; Analytical models; Conducting materials; Doping; Double-gate FETs; MOSFET circuits; Numerical analysis; Permittivity; Temperature; Threshold voltage; Virtual colonoscopy;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.469401
  • Filename
    469401