DocumentCode :
1014361
Title :
Drive-Mode Control for Vibrational MEMS Gyroscopes
Author :
Dong, Lili ; Avanesian, David
Author_Institution :
Dept. of Electr. & Comput. Eng., Cleveland State Univ., Cleveland, OH
Volume :
56
Issue :
4
fYear :
2009
fDate :
4/1/2009 12:00:00 AM
Firstpage :
956
Lastpage :
963
Abstract :
This paper presents a novel design methodology and hardware implementation for the drive-mode control of vibrational micro-electro-mechanical systems gyroscopes. Assuming that the sense mode (axis) of the gyroscope is operating under open loop, the drive-mode controller compensates an undesirable mechanical spring-coupling term between the two vibrating modes, attenuates the effect of mechanical-thermal noise, and most importantly, forces the output of the drive mode to oscillate along a desired trajectory. The stability and robustness of the control system are successfully justified through frequency-domain analysis. The tracking error between the real output and the reference signal for the drive mode is proved to be converging with the increase of the bandwidth of the controller. The controller is first simulated and then implemented using field-programmable analog array circuits on a vibrational piezoelectric beam gyroscope. The simulation and experimental results verified the effectiveness of the controller.
Keywords :
field programmable gate arrays; frequency-domain analysis; gyroscopes; microsensors; piezoelectric devices; robust control; springs (mechanical); vibration control; drive-mode control; field-programmable analog array circuits; frequency-domain analysis; mechanical spring-coupling term; micro-electro-mechanical systems; vibrational MEMS gyroscopes; vibrational piezoelectric beam gyroscope; Analog implementation; drive-mode control; micro-electro-mechanical systems (MEMS); vibrational gyroscopes;
fLanguage :
English
Journal_Title :
Industrial Electronics, IEEE Transactions on
Publisher :
ieee
ISSN :
0278-0046
Type :
jour
DOI :
10.1109/TIE.2008.2010088
Filename :
4694016
Link To Document :
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