Title :
A Novel Dual-Doping Floating-Gate (DDFG) Flash Memory Featuring Low Power and High Reliability Application
Author :
Li, Yan ; Huang, Ru ; Cai, Yimao ; Zhou, Falong ; Shan, Xiaonan ; Zhang, Xing ; Wang, Yangyuan
Author_Institution :
Peking Univ., Beijing
fDate :
7/1/2007 12:00:00 AM
Abstract :
In this letter, a novel Flash memory cell structure using dual doping polysilicon (p-n-p) as the floating gate, which can improve the cell performance and reliability, is proposed. Except for an additional large-angle tilted implantation, the fabrication technology is essentially compatible with standard CMOS technology. Measured results show that the new Flash cell with p-n-p-type floating gate can achieve higher programming speed, lower power, comparable erasing performance, and better data retention characteristics in comparison with conventional n-type floating-gate structure.
Keywords :
CMOS memory circuits; flash memories; high-speed integrated circuits; integrated circuit manufacture; integrated circuit reliability; integrated memory circuits; low-power electronics; CMOS technology; data retention; dual doping polysilicon; flash memory cell; large-angle tilted implantation; p-n-p-type floating gate; programming speed; CMOS technology; Doping; Electrons; Fabrication; Flash memory; Flash memory cells; Leakage current; Nonvolatile memory; Power measurement; Stress; Flash memory; floating gate; low power; programming speed; retention time; stress-induced leakage current (SILC);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2007.897888