Ferrite-Integrated On-Chip Inductors for RF ICs

Author

Yang, Chen ; Liu, Feng ; Ren, Tian-Ling ; Liu, Li-Tian ; Chen, Guang ; Guan, Xiao-Kang ; Wang, Albert ; Feng, Hai-Gang

Author_Institution

Tsinghua Univ., Beijing

Volume

28

Issue

7

fYear

2007

fDate

7/1/2007 12:00:00 AM

Firstpage

652

Lastpage

655

Abstract

This letter reports the design and fabrication of on-chip radio-frequency (RF) inductors with integrated-ferrite thin Alms, which show substantial improvement over air-cored inductors, e.g., 19%-38% and 17%-28% increase in inductance (L) for Y_2.8B_0.2Fe₅O₁₂ and Co₇ZrO₉ thin-film inductors, respectively, and 32%-55% improvement in quality factor (Q) of Co₇ZrO₉ sample, which are all measured across 0.1-9 GHz. It demonstrates the feasibility for making the ferrite-integrated high-performance compact on-chip inductors for RF ICs.

Keywords

bismuth compounds; cobalt compounds; integrated circuit design; radiofrequency integrated circuits; system-on-chip; thin film inductors; yttrium compounds; Co₇ZrO₉ - Interface; RF IC; Y_2.8Bi_0.2Fe₅O₁₂ - Interface; ferrite integrated on chip inductors; quality factor; thin film inductors; Bismuth; Chromium; Fabrication; Ferrites; Iron; Magnetic resonance; Q factor; Radio frequency; Spirals; Thin film inductors; Ferrite; inductors; radio frequency (RF); thin film;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2007.900299

Filename

4252227