Analysis of Frequency- and Temperature-Dependent Substrate Eddy Currents in On-Chip Spiral Inductors Using the Complex Image Method

Author

Kang, Kai ; Shi, Jinglin ; Yin, Wen-Yan ; Li, Le-Wei ; Zouhdi, Saïd ; Rustagi, Subhash C. ; Mouthaan, Koen

Author_Institution

Inst. of Microelectron.

Volume

43

Issue

7

fYear

2007

fDate

7/1/2007 12:00:00 AM

Firstpage

3243

Lastpage

3253

Abstract

Using the complex image method (CIM), we have analyzed the frequency and temperature dependencies of substrate eddy currents for single-ended and differential spiral inductors on a lossy silicon substrate. From our analysis, we have derived a set of accurate closed-form expressions for calculating inductances and substrate losses due to substrate eddy currents. Here, we propose a frequency-dependent eleven-element equivalent circuit model based on these formulas. We established the validity of the model by comparing the simulated and measured results, which are in good agreement.

Keywords

eddy current losses; equivalent circuits; inductance; inductors; complex image method; differential spiral inductor; equivalent circuit model; frequency-dependent substrate eddy currents; inductances; on-chip spiral inductors; silicon substrate; substrate losses; temperature-dependent substrate eddy currents; Closed-form solution; Computer integrated manufacturing; Eddy currents; Equivalent circuits; Frequency; Image analysis; Inductors; Silicon; Spirals; Temperature dependence; Complex image method (CIM); differential inductor; eddy currents; greenhouse algorithm; inductor model;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2007.897087

Filename

4252295