Title :
Optical detection of multiple modes on resonant micromachined structures
Author :
Annovazzi-Lodi, Valerio ; Benedetti, Mauro ; Merlo, Sabina ; Norgia, Michele
Author_Institution :
Diputimento di Elettronica, Univ. degli Studi di Pavia, Italy
fDate :
7/1/2004 12:00:00 AM
Abstract :
In this letter, we report experimental results on the simultaneous detection of multiple vibrational modes, in the horizontal plane, of microelectromechanical systems resonant structures. Frequency response has been obtained by using semiconductor laser feedback interferometry combined with electrical white-noise excitation of the tested devices.
Keywords :
laser feedback; light interferometry; measurement by laser beam; micro-optics; micromechanical devices; nondestructive testing; resonance; semiconductor lasers; vibration measurement; white noise; microelectromechanical systems; multiple vibrational modes; optical detection; resonant micromachined structures; semiconductor laser feedback interferometry; white-noise excitation; Frequency response; Laser excitation; Laser feedback; Laser modes; Microelectromechanical systems; Optical detectors; Optical feedback; Optical interferometry; Resonance; Semiconductor lasers;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.828841
