DocumentCode
1015575
Title
Optical detection of multiple modes on resonant micromachined structures
Author
Annovazzi-Lodi, Valerio ; Benedetti, Mauro ; Merlo, Sabina ; Norgia, Michele
Author_Institution
Diputimento di Elettronica, Univ. degli Studi di Pavia, Italy
Volume
16
Issue
7
fYear
2004
fDate
7/1/2004 12:00:00 AM
Firstpage
1703
Lastpage
1705
Abstract
In this letter, we report experimental results on the simultaneous detection of multiple vibrational modes, in the horizontal plane, of microelectromechanical systems resonant structures. Frequency response has been obtained by using semiconductor laser feedback interferometry combined with electrical white-noise excitation of the tested devices.
Keywords
laser feedback; light interferometry; measurement by laser beam; micro-optics; micromechanical devices; nondestructive testing; resonance; semiconductor lasers; vibration measurement; white noise; microelectromechanical systems; multiple vibrational modes; optical detection; resonant micromachined structures; semiconductor laser feedback interferometry; white-noise excitation; Frequency response; Laser excitation; Laser feedback; Laser modes; Microelectromechanical systems; Optical detectors; Optical feedback; Optical interferometry; Resonance; Semiconductor lasers;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/LPT.2004.828841
Filename
1308271
Link To Document