DocumentCode
1016175
Title
The vacuum evaporation of single crystal thin films of silicon
Author
Hale, A.P. ; James, B.D.
Author_Institution
Fairchild Semiconductor Corp., Mountain View, Calif.
Volume
8
Issue
2
fYear
1961
fDate
3/1/1961 12:00:00 AM
Firstpage
175
Lastpage
175
Keywords
Epitaxial growth; Filling; Gain; Germanium; Guns; Hydrogen; Magnetic fields; Masers; Semiconductor films; Semiconductor thin films; Silicon; Solid state circuits; Substrates; Temperature;
fLanguage
English
Journal_Title
Electron Devices, IRE Transactions on
Publisher
ieee
ISSN
0096-2430
Type
jour
DOI
10.1109/T-ED.1961.14735
Filename
1472898
Link To Document