Title :
Inversion/accumulation-mode polysilicon thin-film transistors: characterization and unified modeling
Author :
Qian, Feng ; Kim, Dae M. ; Kawamoto, Galen H.
Author_Institution :
Dept. of Appl. Phys. & Electr. Eng., Oregan Graduate Center, Beaverton, OR, USA
fDate :
9/1/1988 12:00:00 AM
Abstract :
n- and p-channel enhancement-mode polysilicon thin-film transistors are characterized. The device performance is modeled with the use of an effective doping model. This enables a unified description of both n- and p-channel devices. The model is simple, analytic, and in satisfactory agreement with experimental data. The transconductance behavior is discussed in correlation with the grain boundary properties. The threshold voltage is shown to be determined by the trapped electrons and holes, respectively, and it changes appreciably depending on the gate and drain voltages
Keywords :
electron traps; elemental semiconductors; grain boundaries; hole traps; semiconductor device models; silicon; thin film transistors; TFT; characterization; device performance; doping model; enhancement-mode; grain boundary properties; inversion/accumulation mode; n-channel device; p-channel; polycrystalline Si; polysilicon; thin-film transistors; threshold voltage; transconductance behavior; trapped electrons; trapped holes; unified modeling; Amorphous materials; Capacitance; Doping; Electron traps; Grain boundaries; Semiconductor device modeling; Semiconductor process modeling; Silicon; Thin film transistors; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on