Title :
Computer-aided design of a magnetron sputtering cathode
Author :
Perlov, C.M. ; Brauer, J.R.
Author_Institution :
Magnetic Peripherals, Inc., Minneapolis, MN
fDate :
9/1/1986 12:00:00 AM
Abstract :
A finite element computer program is used to aid the design of a magnetron sputtering cathode. The calculated magnetic fields are shown to accurately predict the wear of the sputtering target. New designs are also evaluated using the finite element program.
Keywords :
FEM; Finite-element method (FEM); Magnetic films/devices; Magnetrons; Sputtering; Anodes; Cathodes; Data systems; Design automation; Electrons; Finite element methods; Magnetic analysis; Magnetic fields; Magnetic flux; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1986.1064418
