• DocumentCode
    1018264
  • Title

    Operation of SOI CMOS devices at liquid-nitrogen temperature

  • Author

    Young, K.K. ; Tsaur, Bor-Yeu

  • Author_Institution
    MIT Lincoln Lab., Lexington, MA, USA
  • Volume
    11
  • Issue
    3
  • fYear
    1990
  • fDate
    3/1/1990 12:00:00 AM
  • Firstpage
    126
  • Lastpage
    128
  • Abstract
    Liquid-nitrogen-temperature (LNT) operation of silicon-on-insulator (SOI) CMOS devices has been investigated experimentally. The maximum carrier mobilities in these devices increase by factors from 1.25 to 4.5 between room temperature and LNT. At LNT, the increase in depletion-layer width and the resulting threshold-voltage increase are limited by the silicon film thickness. For SOI devices with a body contact, the series resistance between channel and body contact increases at lower temperature, resulting in a current kink in saturation I-V characteristics.<>
  • Keywords
    CMOS integrated circuits; carrier mobility; semiconductor-insulator boundaries; SOI CMOS devices; body contact; carrier mobilities; current kink; depletion-layer width; liquid-nitrogen temperature; saturation I-V characteristics; series resistance; threshold-voltage increase; Immune system; Laboratories; MOSFET circuits; Plasma measurements; Plasma temperature; Scattering; Semiconductor films; Silicon; Substrates; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.46955
  • Filename
    46955