Title :
Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar
Author :
Sasaki, Minoru ; Yuki, Shinya ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomechanics, Tohoku Univ., Sendai
Abstract :
An electrostatically driven micromirror device using a thin-film torsion bar is proposed. The mirror rotation angle of 7.3deg at 5 V is demonstrated at the nonresonant condition. A bulk Si micromirror is suspended by SiN thin-film torsion bars. Inside the torsion bar, the tension having the magnitude larger than that of the driving force is included. The torsion bar can have a compliance with the mirror rotation and the rigidity against the unwanted motions (e.g., vertical displacement or in-plane rotation)
Keywords :
electrostatic actuators; micromirrors; silicon compounds; thin film devices; torsion; 5 V; Si micromirror; SiN; SiN thin-film torsion bars; bulk micromirror; driving force; electrostatically driven device; large-rotation micromirror driving; low-voltage micromirror driving; mirror rotation angle; nonresonant condition; rigidity; tense thin-film torsion bar; Bars; Electrostatics; Micromirrors; Mirrors; Semiconductor thin films; Silicon compounds; Springs; Thin film devices; Transistors; Voltage; Electrostatic driving; low-voltage driving; micromirror; tension; thin-film torsion bar;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.879587
