Title :
Relevance of a midinfrared cavity ring-down diagnostic in the study of a dusty SiH4 plasma
Author :
Remy, J. ; Hemerik, M.M. ; Kroesen, G.M.W. ; Stoffels, W.W.
Author_Institution :
Appl. Phys. Dept., Eindhoven Univ. of Technol., Netherlands
fDate :
4/1/2004 12:00:00 AM
Abstract :
We know that cavity ring-down spectroscopy (CRDS) can be of particular relevance in the study of the optical absorption of dust particles in a radio-frequency silane plasma. Although CRDS has historically primarily made use of pulsed lasers as light sources, the experimental design described here is based on 0.1 mW continuous wave multimode lead-salt laser diodes emitting in the midinfrared wavelength range. In order to interrupt the laser beam and reach similar effects to pulsed light sources, we propose a new method called "mode tuning," based on a small detuning of the incoming laser wavelength. This work shows that CRDS has the potential to measure the dynamics of all radicals relevant in the particle nucleation process.
Keywords :
dusty plasmas; plasma diagnostics; silicon compounds; solid lasers; 0.1 mW; SiH4; continuous wave multimode lead-salt laser diodes; dust particle optical absorption; dusty silane plasma; midinfrared cavity ring-down diagnostic spectroscopy; mode tuning; particle nucleation; plasma diagnostics; radical dynamics; radiofrequency silane plasma; Dusty plasma; Electromagnetic wave absorption; Laser modes; Laser tuning; Light sources; Optical pulses; Plasma diagnostics; Radio frequency; Spectroscopy; Stimulated emission; CRDS; Cavity ring-down spectroscopy; FP; Fabry–Pérot; PECVD; complex plasma; detuning; diagnostic; dust; laser diode; mode tuning; silane; solar cells;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2004.826133