DocumentCode
1018903
Title
Characterization of laser produced tetrakis (dimethylamino) ethylene plasma in a high-pressure background gas
Author
Akhtar, Kamran ; Scharer, John E. ; Tysk, Shane Matthew ; Denning, C. Mark
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Wisconsin, Madison, WI, USA
Volume
32
Issue
2
fYear
2004
fDate
4/1/2004 12:00:00 AM
Firstpage
813
Lastpage
822
Abstract
We present an interferometric and spectroscopic characterization of ultraviolet (UV) laser photoionization of a low ionization potential organic vapor, tetrakis (dimethylamino) ethylene (TMAE), seeded in high-pressure air component gases. These experiments are performed to explore the feasibility of using an electrodeless UV laser preionization of TMAE to initiate a plasma seeded in atmospheric pressure gases that can later be sustained by radiofrequency (RF) power by inductive wave coupling, thereby reducing the initiation RF power budget. A large volume (500 cc), high-density (∼1013cm-3), electrodeless plasma is created by single-photon, 193 nm excimer laser ionization. 105 GHz millimeter-wave interferometry along with optical spectroscopy is employed to investigate the plasma formation and decay characteristics. The TMAE plasma decay mechanisms including two-body and three-body recombination with and without high pressure gases are examined and the dominant loss processes discussed and evaluated. Both density and optical emission measurements show a delay of 140 ± 10 ns in the peak plasma density and emission indicating that the dominant ionization process is delayed ionization via excitation of super-excited states. The experiment also shows that TMAE remains a viable seed gas for UV ionization in the presence of air for t≤10 min.
Keywords
organic compounds; photoionisation; plasma density; plasma diagnostics; plasma production by laser; 105 GHz; 130 to 150 ns; 193 nm; RF power; UV laser photoionization; delayed ionization; dominant loss processes; electrodeless UV laser preionization; electrodeless plasma; high-density plasma; high-pressure air component gases; inductive wave coupling; interferometric characterization; large volume plasma; laser produced tetrakis dimethylamino ethylene plasma; low ionization potential organic vapor; millimeter-wave interferometry; optical spectroscopy; plasma decay; plasma density; plasma emission; plasma formation; single-photon excimer laser ionization; spectroscopic characterization; super-excited state excitation; three-body recombination; two-body recombination; Atmospheric-pressure plasmas; Gas lasers; Gases; Ionization; Optical interferometry; Plasma density; Plasma measurements; Plasma properties; Radio frequency; Spectroscopy; High-pressure plasmas; laser ionization and breakdown of plasmas; plasma emission;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2004.826115
Filename
1308560
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