Vacuum deposition of Co-Cr perpendicular anisotropy films on polymer substrates treated with ion beam

The author investigated the effect of ion-beam treatment of polymer substrate surfaces on magnetic properties, microstructure, adhesive force, and recording performances of vacuum-deposited Co-Cr films. Films which are deposited on the ion-beam-treated substrates have higher H_c⊥ than that of the films on untreated substrates without the treatment and have H_keff values high enough for perpendicular magnetic recording applications. With ion-beam treatment the adhesive force of the Co-Cr films is considerably improved, becoming of practical strength. The films deposited on the treated substrates reproduced voltage as high as that of Co-Cr films with Ti underlayer. Ion-beam treatment of the polymer substrates therefore makes both glow discharge treatment and the use of a Ti underlayer unnecessary and promises high manufacturing productivity