• DocumentCode
    1019542
  • Title

    New Applications & Recent Research

  • Author

    Michalopoulos, Diomidis S.

  • Author_Institution
    California State University
  • Volume
    13
  • Issue
    1
  • fYear
    1980
  • Firstpage
    114
  • Lastpage
    114
  • Abstract
    IBM scientists have developed an experimental laser-enhanced electroplating technique that could eliminate the need for the overlaid masks currently employed in conventional IC fabrication.
  • fLanguage
    English
  • Journal_Title
    Computer
  • Publisher
    ieee
  • ISSN
    0018-9162
  • Type

    jour

  • DOI
    10.1109/MC.1980.1653354
  • Filename
    1653354
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1019542