1019618

Impurity profiles in thin, lightly doped, vacuum diffused layers of silicon

Batdorf, B. ; Lee, Lun-Hui ; Wiegmann, W.

Bell Telephone Laboratories

9

6

1962

512

512

Associate members; Biographies; Ceramics; Crystallization; Educational institutions; Electron beams; Germanium; High power amplifiers; Impurities; Laboratories; Low-noise amplifiers; Mechanical engineering; Silicon; Telephony; Temperature; Testing; Transistors;

English

Electron Devices, IRE Transactions on

ieee

0096-2430

jour

10.1109/T-ED.1962.15069

1473297