DocumentCode
1019791
Title
Fibre-optic scanning differential interference contrast optical microscope
Author
Vaez Iravani, M.
Author_Institution
University College London, Department of Electrical & Electronic Engineering, London, UK
Volume
22
Issue
2
fYear
1986
Firstpage
103
Lastpage
105
Abstract
A fibre-based scanning differential phase contrast optical microscope is described. The system does not need an optical bench, and requires a simple detection scheme. It displays a depth resolution of 1 Ã… in a 10 kHz bandwidth. Results of surface studies of a silicon wafer and polished stainless steel are presented.
Keywords
fibre optics; light interference; optical microscopes; 10 kHz bandwidth; Si wafer; depth resolution 1 angstrom; detection scheme; fibre optics scanning differential interference contrast optical microscope; polished stainless steel; surface studies;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19860072
Filename
4256251
Link To Document