DocumentCode

1020082

Title

Methods of isolation of active elements in integrated circuits

Author

Madland, G.

Volume

10

Issue

2

fYear

1963

fDate

3/1/1963 12:00:00 AM

Firstpage

101

Lastpage

102

Keywords

Circuits; Conductivity; Epitaxial growth; Epitaxial layers; Impedance; Impurities; Nonhomogeneous media; Resistors; Silicon; Substrates;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1963.15113

Filename

1473416