Title :
Methods of isolation of active elements in integrated circuits
fDate :
3/1/1963 12:00:00 AM
Keywords :
Circuits; Conductivity; Epitaxial growth; Epitaxial layers; Impedance; Impurities; Nonhomogeneous media; Resistors; Silicon; Substrates;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1963.15113
