Title :
Low temperature oxidation of silicon by electric discharge in oxidizing atmosphere
Author :
Sugano, Tatsuya ; Nakajima, Hiromasa ; Takahashi, Y.
fDate :
3/1/1963 12:00:00 AM
Keywords :
Anodes; Atmosphere; Cathodes; Current density; Insulation; Laboratories; Oxidation; Radio frequency; Silicon; Temperature;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1963.15135
