Title :
Miniature RF Test Structure for On-Wafer Device Testing and In-Line Process Monitoring
Author :
Cho, Ming-Hsiang ; Lee, Ryan ; Peng, An-Sam ; Chen, David ; Yeh, Chune-Sin ; Wu, Lin-Kun
Author_Institution :
United Microelectron. Corp., Hsinchu
Abstract :
In this brief, a miniature test structure for RF device characterization and process monitoring has been proposed. This new layout design can minimize the voltage drop across interconnects and can prevent capacitive coupling to devices. It consumes only 36% and 40% of the chip area of the conventional on-wafer and in-line test structures, respectively. The RF characteristics of the proposed test structure are shown to be in excellent agreement with those of the conventional ones.
Keywords :
CMOS integrated circuits; MOSFET; integrated circuit interconnections; semiconductor device testing; MOSFET; RF device characterization; capacitive coupling; in-line process monitoring; interconnects; miniature RF test structure; on-wafer device testing; CMOS process; Circuit testing; Fixtures; Integrated circuit interconnections; MOSFETs; Microelectronics; Microwave devices; Monitoring; Probes; Radio frequency; MOSFET; RF; process monitoring; scribe line; test structure;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2007.911037
