Title :
Correction factor curves for square-array and rectangular-array four-point probes near conducting or nonconducting boundaries
Author_Institution :
The Bendix Corporation, Southfield, Mich.
fDate :
5/1/1963 12:00:00 AM
Abstract :
Resistivity measurements made with a four-point probe on a sample having at least one of its dimensions small (i. e., of the order of the spacing between the points of the probe or smaller) require a correction factor to compensate for this condition. Correction factors for various four-point probe arrangements near a conducting or a nonconducting boundary have been derived and plotted for cases where : 1) the four-point probe array is rectangular and of various proportions rather than square, 2) the current points of the square-or rectangular-array probe are perpendicular to the boundary 3) the current points of the square-or rectangular-array probe are parallel to the boundary.
Keywords :
Books; Conductivity; Current measurement; Equations; Germanium; Instruments; Probes; Semiconductor materials; Testing;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1963.15173