DocumentCode
1021360
Title
SAW oscillator frequency stability at high temperatures
Author
Sinha, Bikash K. ; Groves, Joel L. ; Sudo, Yukio ; Sat, Shigeru
Author_Institution
Shlumberger-Doll Res., Ridgefield, CT, USA
Volume
37
Issue
2
fYear
1990
fDate
3/1/1990 12:00:00 AM
Firstpage
85
Lastpage
98
Abstract
A broad overview of various factors affecting the frequency stability of surface-acoustic-wave (SAW) resonators is given. Two major causes of rapid degradation in the long-term frequency stability are the presence of a chromium interface between aluminum and quartz, and moderate to high drive levels in SAW devices with pure aluminum fingers, resulting in metal migration in the region of high thin-film stresses. On the other hand, devices with copper-doped aluminum electrodes maintained excellent long-term stability, even when operating at 175 degrees C and at moderately high drive levels. Experimental data on both the long-term and short-term frequency stabilities of SAW devices at 25 degrees C and 175 degrees C for moderate to high drive levels are presented. Results obtained for the frequency stabilities of SAW devices with pure aluminum and copper-doped aluminum electrodes are compared. It is shown that the short-term frequency stability of SAW devices with copper-doped aluminum electrodes is a few parts in 10/sup 10/, even at 175 degrees C and for moderately large drive levels. Overall, the best short-term frequency stability is found to be for a gate time of 0.1 s.<>
Keywords
aluminium; aluminium alloys; copper alloys; crystal resonators; failure analysis; frequency stability; oscillators; quartz; surface acoustic wave devices; 175 C; 25 C; Al-Cr-SiO/sub 2/; Al-SiO/sub 2/; Al:Cu-SiO/sub 2/; IDT fingers; SAW oscillator frequency stability; SAW oscillators; SAW resonators; causes of rapid degradation; elevated temperatures; factors affecting the frequency stability; high drive levels; high film stresses; high temperatures; long-term frequency stability; long-term stability; metal migration; overview; short-term frequency stabilities; Aluminum; Chromium; Degradation; Electrodes; Frequency; Oscillators; Stability; Surface acoustic wave devices; Surface acoustic waves; Temperature;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.46973
Filename
46973
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