Calibration of network analyser measurements with leakage errors

Useful and accurate MMIC wafer probe measurements can only be performed when the network analyser is calibrated at the device under test (DUT) interface and all leakage errors and coupling terms are considered in the error model. To measure the parameters of an MMIC on a wafer, the calibration procedure must be based on the full model. Two simple calibration procedures for determining error correction parameters for the full model are presented. Both 15 term procedures are based on closed solutions and only need three known calibration standards, so that the accuracies are excellent, as proved by measurements