Title :
Metal organic chemical vapor deposition of the Niobium-Nitrogen-Carbon system
Author :
Cukauskas, E.J. ; Holm, R.T. ; Berry, A.D. ; Kaplan, R. ; Green, M. L H ; Kaplan, R. ; Green, Matthew
Author_Institution :
Naval Research Laboratory, Washington, DC
fDate :
3/1/1987 12:00:00 AM
Abstract :
Niobium carbonitride films have been deposited by the pyrolytic decomposition of bis-tolueneniobium and hydrazine onto directly heated, 1-10 Ω-cm,
Keywords :
Chemical vapor deposition; Conductivity; Electrical resistance measurement; Organic chemicals; Propellants; Substrates; Superconducting transition temperature; Thickness measurement; Vacuum systems; Valves;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1987.1064824
