DocumentCode
1022053
Title
AlGaAs/InGaAs/GaAs strained-layer heterojunction bipolar transistors by molecular beam epitaxy
Author
Sullivan, G.J. ; Asbeck, P.M. ; Chang, M.F. ; Miller, Douglas L. ; Wang, K.C.
Author_Institution
Rockwell International Corporation, Microelectronics Research & Development Center, Thousand Oaks, USA
Volume
22
Issue
8
fYear
1986
Firstpage
419
Lastpage
421
Abstract
The growth and characteristics of the first AlGaAs/InGaAs/GaAs HBTs are reported. Layers with up to 10% indium content appeared to be free of misfit dislocations, and resulted in HBTs with good I/V characteristics which scaled with In content according to theory.
Keywords
III-V semiconductors; aluminium compounds; bipolar transistors; gallium arsenide; indium compounds; molecular beam epitaxial growth; semiconductor growth; AlGaAs/InGaAs/GaAs strained-layer heterojunction bipolar transistors; I-V characteristics; In content; misfit dislocations; molecular beam epitaxy; semiconductor growth;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19860286
Filename
4256479
Link To Document