Title :
Dual-frequency modified C/V technique
Author :
L¿¿nnum, L.F. ; Johannessen, J.S.
Author_Institution :
ELAB, Trondheim, Norway
Abstract :
A technique is presented which allows the carrier density profile to be obtained from very leaky Schottky-barrier devices. Measurements of the impedance as a function, of applied reverse voltage for two frequencies are combined to yield the depletion layer capacitance, along with expressions for the parasitic series and shunt resistances. The technique is easily extendable to MOS devices.
Keywords :
Schottky-barrier diodes; doping profiles; equivalent circuits; semiconductor device models; MOS devices; carrier density profile measurement; depletion layer capacitance; dual frequency modified C/V technique; leaky Schottky-barrier devices; models; parasitic resistance; reverse voltage for two frequencies;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19860310