Title :
An MMIC-compatible tightly coupled line structure using embedded microstrip
Author :
Willems, David ; Bahl, Inder
Author_Institution :
ITT, Fort Wayne, IN, USA
fDate :
12/1/1993 12:00:00 AM
Abstract :
The authors present a highly manufacturable coupled line structure for MMICs (monolithic microwave integrated circuits) which uses embedded microstrip to achieve tight coupling and only uses the process steps necessary to make MIM (metal-insulator-metal) capacitors. Passive circuits demonstrated using this technique include a single-section 5-21-GHz broadband 3-dB coupler and a 6-15-GHz 90° Schiffman section. The coupler and the Schiffman section use tight (2-dB) to extremely tight (0.7-dB) coupling factors, respectively. This is the first time that a coupler has achieved such a wide bandwidth on a 125-μm-thick GaAs substrate
Keywords :
MMIC; gallium arsenide; metal-insulator-metal devices; microstrip lines; waveguide couplers; 125 mum; 2 to 7 GHz; 5 to 21 GHz; 6 to 15 GHz; 75 mum; GaAs; GaAs substrate; MIM capacitors; MMIC; Schiffman section; coupled line structure; embedded microstrip; insertion phase difference; passive circuits; quadrature couplers; single-section broadband 3-dB coupler; tight coupling; wide bandwidth; Coupling circuits; Integrated circuit manufacture; MIM capacitors; MMICs; Manufacturing processes; Metal-insulator structures; Microstrip; Microwave integrated circuits; Monolithic integrated circuits; Passive circuits;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
