Title :
Post-CMOS electrode formation and isolation for on-chip temperature-controlled electrochemical sensors
Author :
Trombly, N. ; Mason, A.
Author_Institution :
Michigan State Univ., East Lansing
Abstract :
A low-cost post-CMOS fabrication process enabling the formation of thermally controlled and isolated microelectrode array sites suitable for biomimetic and bioelectronic protein attachment on existing CMOS circuitry has been developed and implemented in the fabrication of an electrochemical array system for biosensing applications.
Keywords :
CMOS integrated circuits; biomedical electrodes; biosensors; electrochemical sensors; bioelectronic protein attachment; biomimetic; isolated microelectrode array; low-cost post-CMOS fabrication process; on-chip temperature-controlled electrochemical sensors; post-CMOS electrode formation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20080912