DocumentCode :
1023192
Title :
Post-CMOS electrode formation and isolation for on-chip temperature-controlled electrochemical sensors
Author :
Trombly, N. ; Mason, A.
Author_Institution :
Michigan State Univ., East Lansing
Volume :
44
Issue :
1
fYear :
2008
Firstpage :
29
Lastpage :
30
Abstract :
A low-cost post-CMOS fabrication process enabling the formation of thermally controlled and isolated microelectrode array sites suitable for biomimetic and bioelectronic protein attachment on existing CMOS circuitry has been developed and implemented in the fabrication of an electrochemical array system for biosensing applications.
Keywords :
CMOS integrated circuits; biomedical electrodes; biosensors; electrochemical sensors; bioelectronic protein attachment; biomimetic; isolated microelectrode array; low-cost post-CMOS fabrication process; on-chip temperature-controlled electrochemical sensors; post-CMOS electrode formation;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:20080912
Filename :
4415011
Link To Document :
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