Title :
Reflection high-energy electron diffraction from lithium niobate single-crystal surfaces for application in molecular beam epitaxy
Author :
Petrucci, M. ; Pitt, C.W.
Author_Institution :
University College London, Department of Electronic & Electrical Engineering, London, UK
Abstract :
A modified RHEED system has been constructed to study nonconductive crystal lithium niobate (LiNbO3) using electron energies up to 50 keV. The problems encountered are discussed and preliminary results presented. We outline the potential use of the technique in the routine analysis of insulating substrates prior to the deposition of epitaxial layers by MBE, and in the examination of the deposited layers.
Keywords :
integrated optics; lithium compounds; molecular beam epitaxial growth; reflection high energy electron diffraction; LiNbO3; MBE; RHEED system; electron energies; integrated optics; molecular beam epitaxy; routine analysis of insulating substrates; single-crystal surfaces;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19860437