• DocumentCode
    1023669
  • Title

    Self-adjusted permanent attachment of fibres to GaAs waveguide components

  • Author

    Kaufmann, H. ; Buchmann, Peter ; Hirter, R. ; Melchior, H. ; Guekos, G.

  • Author_Institution
    Swiss Federal Institute of Technology, ETH Hönggerbery, Zÿrich, Switzerland
  • Volume
    22
  • Issue
    12
  • fYear
    1986
  • Firstpage
    642
  • Lastpage
    644
  • Abstract
    We present a self-aligned flip-chip mounting technique for permanent coupling of single-mode fibres to rib waveguides By help of reactive-ion-etched alignment ribs and preferentially etched silicon V-grooves, self-adjusted alignment with excess coupling loss as low as 0.3 dB has been achieved.
  • Keywords
    III-V semiconductors; gallium arsenide; integrated optics; optical couplers; optical fibres; GaAs waveguide components; RIE; excess coupling loss; permanent attachment of fibres; permanent coupling; preferentially etched Si V-grooves; reactive-ion-etched alignment ribs; self-adjusted alignment; self-aligned flip-chip mounting technique; semiconductors; single-mode fibres to rib waveguides;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19860440
  • Filename
    4256638
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1023669