DocumentCode
1023914
Title
Microwave surface resistance of reactively sputtered NbN thin films
Author
Bautista, J.J. ; Strayer, D.M. ; Berry, M.J. ; Faris, S.M.
Author_Institution
California Institute of Technology, Pasadena, CA
Volume
23
Issue
2
fYear
1987
fDate
3/1/1987 12:00:00 AM
Firstpage
851
Lastpage
853
Abstract
The surface resistance of niobium nitride (NbN) thin films has been measured at 7.78 and 10.14 GHz in the temperature range of 1.5 to 4.2 K. The films were reactively sputtered on sapphire substrates to a thickness of approximately one micron. The surface resistance was determined by measuring the quality factor (Q) of the TEO11 mode of a lead-plated copper cavity where the NbN served as one end-cap of the cavity.
Keywords
Microwave filters; Resistance measurements; Slow-wave structures; Superconducting cavity resonators; Superconducting films; Electrical resistance measurement; Sputtering; Substrates; Superconducting device noise; Superconducting devices; Superconducting films; Superconducting microwave devices; Superconducting transmission lines; Surface resistance; Temperature;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1987.1064990
Filename
1064990
Link To Document