Title :
Silicon mosaic for integrated devices
fDate :
9/1/1965 12:00:00 AM
Abstract :
A new method of integrating silicon devices is discussed. Preliminary results of work are reported and a recommendation for continued development is given.
Keywords :
Capacitive sensors; Circuits; Diodes; Glass; Polarization; Silicon; Slabs; Softening; Temperature; Thickness measurement;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1965.15535
