Title :
Output beam focusability of a Nd:glass zig-zag slab laser
Author :
Kim, Byung-Tai ; Oishibashi, Yasuo ; Kanabe, Tadashi ; Nakatsuka, Masahiro ; Nakai, Sadao
Author_Institution :
Inst. of Laser Eng., Osaka Univ., Japan
Abstract :
The focusability of a zig-zag optical path laser with a 230*65*5 mm Nd:glass for application to soft X-ray generation is described. A Q-switched laser output energy of 18.3 J with a pulse width of 28 ns was obtained in a phosphate glass LHG-5 (Nd:8 wt.%), with an extraction efficiency of 71% from a stored energy of 26 J at a pumping energy of 4 kJ. The focusability was achieved up to 6.2*10/sup 12/ W/cm/sup 2/ in a spot size of 100 mu m, which was sufficient intensity to generate soft X-rays for X-ray lithography.<>
Keywords :
Q-switching; X-ray lithography; X-ray production; focusing; laser beams; neodymium; solid lasers; 100 micron; 18.3 J; 230 mm; 26 J; 28 ns; 4 kJ; 5 mm; 65 mm; 71 percent; Cu target; Nd:glass zig-zag slab laser; Q-switched laser output energy; X-ray conversion efficiency; X-ray lithography; extraction efficiency; output beam focusability; phosphate glass; pulse width; pumping energy; soft X-ray generation; spot size; stored energy; zig-zag optical path laser; Glass; Laser beams; Laser excitation; Optical pulses; Optical pumping; Pump lasers; Slabs; Space vector pulse width modulation; X-ray lasers; X-ray lithography;
Journal_Title :
Photonics Technology Letters, IEEE
