Title :
Differential amplitude imaging in scanning optical microscope
Author :
See, C.W. ; Iravani, M.Vaez
Author_Institution :
University College London, Department of Electrical Engineering, London, UK
Abstract :
A differential amplitude scanning optical microscope (DASOM) is described. The system, which uses a simple optical and electronic arrangement, is capable of detecting variations in optical reflectivity of 9 × 10¿6 in a 10kHz bandwidth. Results of surface studies of polished stainless steel and of natural diamond are presented.
Keywords :
optical microscopes; reflectometry; surface structure; differential amplitude scanning optical microscope; natural diamond; optical reflectivity; polished stainless steel; surface studies;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19860655
