DocumentCode
1025746
Title
Differential amplitude imaging in scanning optical microscope
Author
See, C.W. ; Iravani, M.Vaez
Author_Institution
University College London, Department of Electrical Engineering, London, UK
Volume
22
Issue
18
fYear
1986
Firstpage
961
Lastpage
962
Abstract
A differential amplitude scanning optical microscope (DASOM) is described. The system, which uses a simple optical and electronic arrangement, is capable of detecting variations in optical reflectivity of 9 à 10¿6 in a 10kHz bandwidth. Results of surface studies of polished stainless steel and of natural diamond are presented.
Keywords
optical microscopes; reflectometry; surface structure; differential amplitude scanning optical microscope; natural diamond; optical reflectivity; polished stainless steel; surface studies;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19860655
Filename
4256862
Link To Document