• DocumentCode
    1025746
  • Title

    Differential amplitude imaging in scanning optical microscope

  • Author

    See, C.W. ; Iravani, M.Vaez

  • Author_Institution
    University College London, Department of Electrical Engineering, London, UK
  • Volume
    22
  • Issue
    18
  • fYear
    1986
  • Firstpage
    961
  • Lastpage
    962
  • Abstract
    A differential amplitude scanning optical microscope (DASOM) is described. The system, which uses a simple optical and electronic arrangement, is capable of detecting variations in optical reflectivity of 9 × 10¿6 in a 10kHz bandwidth. Results of surface studies of polished stainless steel and of natural diamond are presented.
  • Keywords
    optical microscopes; reflectometry; surface structure; differential amplitude scanning optical microscope; natural diamond; optical reflectivity; polished stainless steel; surface studies;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19860655
  • Filename
    4256862