DocumentCode

1025755

Title

Extremely low capacitance silicon film MOS transistors

Author

Ross, E.C. ; Mueller, C.W.

Author_Institution

RCA Laboratories, Princeton, N. J.

Issue

3

fYear

1966

fDate

3/1/1966 12:00:00 AM

Firstpage

379

Lastpage

381

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1966.15696

Filename

1474286